Abstract
In order to improve dimensional accuracy of workpieces, in-process measurement is considered the best. As for accurate dimensional deviation measurement, some optical measuring methods have been developed, but optical methods are not suitable using in wet condition such as turning or grinding operations. Measuring method using ultrasonic wave can be used even in such a severe environment. This study deals with development of ultrasonic sensor for displacement measurement based on astigmatic focus error detection. First, the measuring principle and the basic analysis for obtaining a design method are described. Then, the experimental results that show the validity of the principle are shown.
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