Abstract
This paper presents the design and development of a nano-displacement measurement system based on the SPPE framework. The system consists of an optical probe modified from a laser pickup head, as well as a holographic grating as a position reference. In order to deliver high bandwidth and better resolution measurement, H ∞ loop filter design is incorporated into the phase lock loop (PLL). Furthermore, a phase to displacement algorithm is used to recover displacement from phase output of PLL. Experiment is set up for off-line measurement and shows a measurement result with sub-nanometer resolution and satisfactory measurement repeatability.
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