Development of a multi-functional multi-probe atomic force microscope system with optical beam deflection method.

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We developed a multi-probe atomic force microscope (MP-AFM) system with up to four probes and realized various functions such as topography mapping, probing electrical property, and local temperature measurement. Each probe mounted on the corresponding probe scanner was controlled independently, and the system employed the optical beam deflection method to measure the deflection of each cantilever. A high-performance MP-AFM system with a compact optical designand rigid actuators was finally established. We demonstrated AFM high-resolution imaging in air and performed four-probe imaging in parallel and multi-functional characterization with the MP-AFM system.