Abstract
Accurate material testing based on the nanoindentation method always demands more and more accurate and sensible indentation instruments. A microelectromechanical system-based microminiature nanoindentation instrument is proposed, which features high force resolution (about 1 nN) and relatively large measurement range (up to 1 mN). The design of the microelectromechanical system is detailed, including the simulation of the mechanical system and the system performance. Preliminary experiments have been carried out with the aim to demonstrate the feasibility of this microminiature indentation system.
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