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Abstract
We improved the large restoration force of a radio-frequency microelectromechanical system (RF MEMS) switch, which had been a challenge in the practical application of RF MEMS switches, by adopting a non-linear spring system for the electrostatic actuator. When an electrostatic actuator with a movable electrode area of 1.4 mm 2 was driven at a voltage of 24 V, analysis showed a restoration force three-fold greater than that of conventional linear spring systems and a stable signal on–off control action. It was also established from simulation and observation of the RF characteristics in a plastic mold package that the actuator has the ability comparable to or exceeding the characteristics of positive intrinsic negative (PIN) diodes and GaAs metal-semiconductor field-effect transistors (MESFETs).
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