Abstract
A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employing a differential oscillation loop. The effect of the Pd-Ni film thickness on sensing performance was also evaluated, and optimal parameters were determined, allowing for fast response and high sensitivity. Excellent working stability (detection error of 3.7% in half a year), high sensitivity (21.3 kHz/%), and fast response (less than 10 s) were achieved from the 40 nm Pd-Ni alloy thin-film coated sensing device.
Highlights
As an efficient energy source, hydrogen gas features the advantages of clean energy, nontoxic, pollution-free, and high utilization ratio
Typical sensing devices are composed of a surface acoustic wave (SAW) device patterned by a resonator or delay line, and a sensitive thin film deposited on top of the SAW device
The adsorption in the sensitive thin film towards target gas molecules modulates the SAW propagation, and the corresponding shift in frequency is collected as the sensing signal
Summary
As an efficient energy source, hydrogen gas features the advantages of clean energy, nontoxic, pollution-free, and high utilization ratio. The early warning of hydrogen gas leakage is an essential way to improve the security, and it requires the hydrogen sensor to possess some essential properties, such as fast response, high sensitivity, and excellent working stability. The adsorption in the sensitive thin film towards target gas molecules modulates the SAW propagation, and the corresponding shift in frequency is collected as the sensing signal. The ball SAW devices suffer from the complex technique, and no further investigations on working stability benefiting from the alloy structure have been done in previous literatures. They are the main focus of this work. The typical sensor performance metrics, such as sensitivity, response speed, and working stability, were evaluated experimentally
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