Abstract
This paper reports the new development of an optical microscope automatic focus control system (OMAFD) for the JXA-8800/8900 series Electron Probe Microanalyser (EPMA). In recent years, a method called “wide area mapping” has been increasingly used with EPMA for measurement of X-rays by moving the specimen to obtain 2-dimensional element distributions over large analysis areas. In mapping, the simultaneous acquisition of multiple elements is required. Using an optical microscope, which has a very small (about ±1 μm) depth of focus, the specimen surface needs to be vertically adjusted to the Rowland circle of a wavelength dispersive X-ray spectrometer. Even with flat specimens, actual analysis points often show some inclination. Specimens are often inclined accidentally during sample preparation and mounting. Moreover, requirements of specimen analysis with curved or irregular surfaces have been increasing.
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