Wavelength-Dispersive X-Ray Spectrometry and Microanalysis

Charles E Lyman,Patrick Echlin,Eric Lifshin,Dale E Newbury,Charles E Fiori,David C Joy,A D Romig ,David B Williams ,Joseph I Goldstein ,J T Armstrong ,Klaus‐Ruediger Peters

doi:10.1007/978-1-4613-0635-1_7

Wavelength-Dispersive X-Ray Spectrometry and Microanalysis

Charles E Lyman, Patrick Echlin + Show 9 more

https://doi.org/10.1007/978-1-4613-0635-1_7

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Publication Date: Jan 1, 1990

Affiliation: Lehigh University, University of Cambridge, National Institute of Standards and Technology, University of Tennessee at Knoxville, Sandia National Laboratories, California Institute of Technology, University of Connecticut Health Center

#Wavelength-dispersive X-ray Spectrometer #Energy-dispersive Spectrometer Detectors + Show 8 more

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Abstract

This laboratory demonstrates the operation of a wavelength-dispersive x-ray spectrometer (WDS) fitted to a scanning electron microscope (SEM) or electron probe microanalyzer (EPMA). The WDS has important advantages over the energy-dispersive spectrometer (EDS) in terms of the peak-to-background ratio, improved elemental sensitivity, and better energy resolution of characteristic x-ray peaks to avoid peak overlaps. Comparisons of the major characteristics of the WDS and EDS detectors will be made. More detailed background information may be found in SEMXM, Chapters 5–8.

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