Development of a high-precision two-dimensional coplanar micro-vibration generator

Abstract

In this study, we propose a high-precision two-dimensional (2D) coplanar micro-vibration generator with a flexure-decoupling mechanism. The generator is composed of a 2D symmetrical coplanar platform and a slider pair. The 2D symmetrical coplanar platform is connected to the base through six compound basic parallelogram modules, which are orthogonally arranged to implement motion decoupling in the X and Y directions. A vertical support with a slider pair is used to guarantee strict planar motion under heavy loads. The generator is driven by two piezoelectric actuators. The generator is dynamically identified through the adaptive least-square method to obtain its dynamic characteristics, and experiments are conducted to validate the performance of the developed generator. Notably, the developed generator has the capability of translational motion strokes of 48.71 μm and 49.10 μm in the X and Y directions, respectively, and the maximum coupling error is approximately 0.78%. The motion resolution of the generator is 1.3 nm. The experimental results also show that the developed generator has good load capacity and trajectory tracking capabilities.