Abstract
A high-precision two-dimensional (2D) coplanar micro-vibration generator with a flexure decoupling mechanism is proposed in this study. The generator is composed of a 2D symmetrical coplanar platform and a slider pair. The 2D coplanar platform structure is fully symmetric to achieve decoupling of motion in the X and Y directions. The vertical support with a slider pair is used to guarantee strict planar motion with heavy loads. Under open-loop control, the developed generator has the capability of translational motion stroke of 48.71 μm and 49.10 μm in the X and Y directions, respectively, and the maximum coupling error is approximately 0.78%. A PID control system was designed to realize the closed-loop control of the vibration generator. The control system can effectively reduce the inertial vibration and settling time of the generator. In addition, the closed-loop controlled vibration generator also has good motion tracking characteristics.
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