Abstract
A dual-ion beam accelerator connected with a TEM has been developed for in situ observation of radiation-induced defects. The system consists of a 400-kV Cockcroft-Walton accelerator, which can accelerate two different kinds of ions alternatively, and a 200-kV TEM equipped with a high-sensitivity TV camera. The ion beam from the accelerator is fed into the TEM by an electrostatic beam transport system which consists of three deflectors, two quadrupole lenses and a 57° static prism. A copper specimen is bombarded with 150-keV Ar ions. A small cascade of < 5 nm in diameter is observed for an Ar-ion current of about 85 nA/cm 2. At a higher current of 1 μA/cm 2, recombination, growth, overlap, and collective motions of cascades are observed during irradiation. In situ observation of argon bubbles at a grain boundary of copper gives a diameter growth rate of 2.8 × 10 −2 nm/s at a dose rate of 5.3 × 10 14 Ar +/cm 2 s and a temperature of about 500 K.
Published Version
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