Abstract
A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400–1000 K and 1013–1014 cm−3, respectively.
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