Abstract
We have developed a monolithic radiation pixel detector using silicon on insulator (SOI) with a commercial 0.15 {micro}m fully-depleted-SOI technology and a Czochralski high resistivity silicon substrate in place of a handle wafer. The SOI TEG (Test Element Group) chips with a size of 2.5 x 2.5 mm{sup 2} consisting of 20 x 20 {micro}m{sup 2} pixels have been designed and manufactured. Performance tests with a laser light illumination and a {beta} ray radioactive source indicate successful operation of the detector. We also briefly discuss the back gate effect as well as the simulation study.
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