Abstract
This article presents a method for deriving the transfer function for the developed design of a micromechanical accelerometer. A behavioural model of the MEMS accelerometer has been developed taking into account its dynamic and static properties. The obtained simulation results confirm the reliability of the constructed model. For example, under the influence of 5g acceleration, the movement of the sensitive element is 0.9 µm. Reducing the natural frequency increases the stroke of the sensitive element by 0.5 µm.
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