Abstract
The development and research of micro and nanostructures for the manufacture of ultrasonic piezoacoustic elements has been carried out. The structures obtained in this work have practical applications for the manufacture of piezoelectric and piezoacoustic elements, in particular, for using in liquid flowmeters as receivers and emitters of an ultrasonic signal. A structure of nanocells was obtained that was different from standard piezoelectric elements (disk, cylinder), but with the same coefficients, characteristics, and radiation pattern.
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