Abstract
Barium Strontium Titanate (BST) thin film has been manufactured by using chemical solution deposition (CSD) method with annealing temperature of 850 ̊C and variations of the holding times of 8, 15, 22 and 29hours. BST thin film was pyroelectric material which was sensitive to temperature. Thin film which has been made will be used for temperature sensors on the satellite. The BST thin film sensitivity has been characterized against the temperature. Before analyzed, BST thin film was connected to the amplifier (op amp) circuit for increasing the sensitivity. This film was put into the furnace with temperature variations of around 30-100 ̊C. Then the electrical conductivity and pyroelectric properties from the resulted thin films were characterized. The results showed that the higher the temperature lead to the lower the resistivity and the higher the conductivity. Based on the data, the BST thin film of 29hours has the highest pyroelectric coefficient of 8x10-5 C.m-2.K-1 among others.
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