Abstract
In this paper, we present the fabrication of an efficient thin film temperature sensor utilizing chemical vapor deposited carbon nanotube (CNT) film as the sensing element on Si substrates, with diamond-like carbon (DLC):Ni as a catalyst in assisting CNT growth. The fabricated sensor showed good electrical response with change in temperature. Relative linear change in resistance of 18.4% for an increase in temperature from 22 °C to 200 °C was achieved. Various characterizing techniques, such as scanning electron microscopy (SEM) and Raman spectroscopy, were used to characterize the films. In an effort to study device performance, van der Pauw and Hall measurements were carried out to study the dependence of resistance on temperature and magnetic fields. Temperature coefficient of resistance of the sensor was calculated as 1.03 × 10−3/°C. All implications arising from the study are presented. The results establish the aptness of the as-grown CNT film to be used as an active sensing material in thin film temperature sensors.
Highlights
Out of all available temperature sensors, resistance temperature detectors (RTD) are the most used type as they are easy to read
In this paper,over we report the fabrication of an efficient thin temperature sensor an efficient thin film temperature sensor from layered multiwalled carbon nanotubes (MWCNTs) on from layered multiwalled carbon nanotubes (MWCNTs) on diamond-like carbon (DLC):Ni/Si substrates followed by their
Several trials were made in order to find the optimized combination of growth temperature, deposition rate, and growth time to achieve continuous and high quality CNT growth on the DLC:Ni layer sitting over the Si substrate
Summary
Out of all available temperature sensors, resistance temperature detectors (RTD) are the most used type as they are easy to read. TFS are used in a wide range of applications, including mechanical, aerospace, medical, chemical, and many other industries [1,2,3,4,5] These sensors are very apt for such measurements because of their sufficiently short response time that is made possible by the small thickness of the films and because they bear a linear relationship between film resistance and temperature [6]. CNTs can can be be used used as as fillers fillers in in composites composites to to sense including sense temperature, temperature, offering small-scale sensors with high sensitivity, fast response time, and low power consumption. TFS, with a viewTFS, to quantify the enhancement foundation for creating multilayered structure of nanocomposite-based with a view to quantify in sensitivity with the number of layers and optimize them, including their thickness.
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