Carbon nanotube based temperature sensors fabricated by large-scale spray deposition

Abstract

We present high-performance temperature sensors which utilize spray deposited carbon nanotube (CNT) films as the active sensing material. In order to evaluate device performance, the change in device resistance with respect to change in temperature is monitored. The fabricated sensors show very good electrical response to the change in temperature. Relative change in resistance as high as 25% for an increase of temperature from 0°C to 80°C can be achieved. Also in this work, a comparative experiment is carried out in order to investigate the effect of CNT film thickness on the characteristics of CNT-based temperature sensors. Results show that films with higher thickness exhibit a lower temperature coefficient of resistance (TCR) as compared to those with lower thickness, while demonstrating higher stability and reproducibility. Finally, another important feature of the devices presented is that the change in resistances with respect to temperature change is nearly linear.