Developing a High-Power Multilayer Ceramic Capacitor Qualification Test Setup for RF Subsystems

Abstract

Radio frequency (RF) power-matching circuits are used in many applications that require controllable and efficient power transfer for a variable load. They are commonly found in plasma chambers in the semiconductor manufacturing industries which deal with highly dynamic loading conditions. State-of-the-art technologies for the power-matching circuits in plasma generation utilize multilayer ceramic capacitors (MLCCs) as one of the main passive components in the tuning circuitry. Such matching circuits must have the capability of withstanding high RF currents without thermal breakdown. A thermal breakdown is caused by the dissipated heat in the MLCC units at high RF currents. Therefore, a qualifying process is required for testing the MLCC functionality. This paper develops a repeatable test-bench setup for the qualification of MLCC units for power matching in a plasma generating circuits. The setup described in this paper enables the industry to develop performance criteria for the MLCC units. The test bench was built using a conventional tunable matching network to deliver the RF power to the MLCC unit under test. The functionality of the test bench is verified using Keysight’s Advanced Design System simulation tool. Finally, instrumentation software of the National Instruments’ LabVIEW is utilized as a graphical user interface to automate the inspection process.