Abstract
For a scanning differential heterodyne microscope, the two-dimensional point spread function and the pupil function are determined from experimental measurements of the intensity distribution of a probing beam. The phase components of these functions were restored from the measured distributions using the Gerchberg-Saxton algorithm. Based on the two-dimensional pupil function, the three-dimensional point-spread function is determined in the scalar approximation using the Debye integral. The aberration function of the microscope is analyzed from the viewpoint of the composition of aberrations and method of their balancing. The focusing adjustment criterion of the microscope for an object under study by the phase response from the test structure is considered.
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