Abstract
Zero-order interference fringe identification is a powerful tool for measuring large step heights. In contrast to white light scanning interferometry, this study utilizes an external cavity diode laser as the light source. The zero-path difference point can be accurately identified by combining wavelength scanning interferometry, in which the laser wavelength is continuously changed, with single wavelength interferometry, in which the laser wavelength is fixed. The experimental apparatus is a two-arm interferometer containing the sample in the measurement arm. The step height denotes the distance between two locations of a zero-order interference fringe, which are obtained by continuously varying the length of the reference arm. The accuracy of a sample of 10mm step height was found to be 0.33μm.
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