Determining adhesion and hermeticity of the interface between encapsulation polymer and insulating layer of micro-sensing chips via a capacitance–voltage technique

Abstract

The successful application of micro-sensing chips based on ion-sensitive field effect transistor principles depends on preventing the penetration of electrolyte into the interface between the encapsulation polymer and the insulating layer. This study employs a capacitance–voltage (C–V) technique to evaluate the adhesion and hermeticity of the polymer-substrate interface in a liquid environment. Three-layered structures simulating micro-sensing chips were fabricated for the evaluation. Each three-layered structure comprises an upper epoxy layer (with or without a window opening), a middle dielectric layer, and a lower Si wafer substrate. Equivalent circuits were established to explain the C–V characteristics of the three-layered structures. The results show that by applying the C–V technique and using an appropriate equivalent circuit, the adhesion and hermeticity between the encapsulating epoxy layer and the insulating layer can be evaluated.