Abstract
Ionized cluster beam deposition uses a beam of ionized, accelerated atom clusters to grow thin films. Earlier unsuccessful attempts at forming such cluster beams by homogeneous nucleation used 1 mm×1 mm nozzles at crucible pressures around 2 Torr. Recently, Gspann [Proc. German Phys. Soc. 3, 387 (1992)] and the authors [Appl. Phys. Lett. 61, 1180 (1992)] produced significant numbers of large zinc clusters by increasing the crucible pressure to the 1000 Torr range and using a converging-diverging nozzle 18 mm long and 0.4 mm in diameter at the throat. The cluster distribution for a crucible temperature of 1180 °C peaked around an average of 2200 atoms per cluster. This distribution was measured by extending the previous deflected deposition method for average size to apply for the entire ionized fraction of the beam. Cluster velocity was nearly constant over the entire distribution in agreement with what would be expected for a homogeneous nucleation process. Over 99% of the ionized beam was in the form of clusters.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call