Determination of Work Function for p- and n-Type 4H-SiC Single Crystals via Scanning Kelvin Probe Force Microscopy

Abstract

Silicon carbide (SiC) is a promising platform for fabricating high-voltage, high-frequency and high-temperature electronic devices such as metal oxide semiconductor field effect transistors in which many junctions or interfaces are involved. The work function (WF) plays an essential role in these devices. However, studies of the effect of conductive type and polar surfaces on the WF of SiC are limited. Here, we report the measurement of WFs of Si- and C-terminated polar surfaces for both p-type and n-type conductive 4H-SiC single crystals by scanning Kelvin probe microscopy (SKPFM). The results show that p-type SiC exhibits a higher WF than n-type SiC. The WF of a C-terminated polar surface is higher than that of a Si-terminated polar surface, which is further confirmed by first-principles calculations. By revealing this long-standing knowledge gap, our work facilitates the fabrication and development of SiC-based electronic devices, which have tremendous potential applications in electric vehicles, photovoltaics, and so on. This work also shows that SKPFM is a good method for identifying polar surfaces of SiC and other polar materials nondestructively, quickly and conveniently.