Abstract

The demand for powdered quartz with low alpha —radioactivity has been increasing in the field of manufacturing semiconductor memory device packages. In this work, the determination of uranium in powdered high-purity quartz samples was studied using a simplified fission track procedure in which ∼ 0.5 g each of sample and a fission track detector (synthetic quartz glass plate, uranium impurity ∼ 0.04 ppb) were loaded in a polyethylene capsule and irradiated with a thermal neutron flux of ∼ 1017 cm−2. An easy procedure was also employed for chemical etching of fission tracks. All measurements of uranium concentration in the samples were made on a relative basis by comparing the unknown track densities to that measured for NBS glass SRM 617. The reliability was established for the present determination of uranium down to ∼ 0.1 ppb. The concentrations of uranium in powdered quartz samples studied in this work were in a range from 7.9 down to 0.12 ppb.

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