Abstract
Li/Ni ratios in Li x Ni 1 − xO films were determined by simultaneous use of the PIXE (particle-induced X-ray emission) and PIGE (proton-induced gamma-ray emission) techniques using the 3.5 MeV proton beam provided by the CISE tandem Van de Graaff accelerator. The general features of the experimental setup are presented and discussed along with the results on the dependence of Li/Ni ratios on the e-beam evaporation and thermal treatments. Preliminary results obtained by XRD (X-ray diffraction) are also discussed. The combined use of PIXE and PIGE proves to be a unique opportunity for nondestructive measurement in thin films and, through the correlation with structural data, it allows a careful optimization of the deposition process and thermal treatment parameters to be obtained.
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