Determination of the infrared absorption cross-section of the stretching vibrations of Ge–O bonds in GeOx films

Abstract

The cross-section of the infrared (IR) absorption of the Ge-O stretching mode in both GeO2 and GeOx films was determined. The GeO2 film was obtained by thermal oxidation of germanium while the GeOx film was obtained by physical vapor deposition. The latter was then annealed at a temperature of 550 °C for 30 min. Both the as-deposited and the annealed films were studied using IR absorption spectroscopy, Raman spectroscopy, ellipsometry and X-ray photoelectron spectroscopy. We found the absorption cross-section is about 2 ÷ 2.6·10–19 cm−2 for the GeO2 films and 0.8·10−19 cm−2 for the GeOx (x ∼ 1.1) film.