Abstract

We report an in situ dynamic method for the determination of the surface concentration of adsorbed arsenic in the metalorganic molecular beam epitaxial growth of GaAs from trimethylgallium (TMGa) and As2. Changes in the reflection high electron energy diffraction intensity oscillation period are observed under arsenic limited conditions, in which the decomposition of TMGa is strongly mediated by adsorbed arsenic. The period of the oscillations at the onset of growth indicates a time dependence in which the period gradually increases from the first oscillation to a steady state value after the growth of several monolayers. The results are interpreted as being due to an initial excess arsenic coverage which acts as a secondary source in this growth regime.

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