Abstract

Optical emission spectroscopy is applied to the study of a radiofrequency (13.56 MHz) discharge in methane used to obtain hydrogenated carbon films and particles. The methane dissociation allows the creation of species in the plasma bulk as H2, H, and CH. The emission lines of these species are studied as a function of time and of incident rf power. The electron temperature is determined from the two line radiance ratio method and the corona balance model using the Balmer lines (Hα, Hβ, and Hγ). The incident rf power enhancement in the range 40–120 W leads to the increase in the emission line intensities as the electron temperature decreases. The temporal variations of CH and hydrogen emission lines, of the dc self-bias voltage, and of the electron temperature are correlated both with the particle behavior and growth in the plasma, and with the coating that grows onto the powered electrode.

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