Abstract
In two previous papers, we proposed a rigorous electromagnetic formalism to study the coupling resonances which occur when a plane wave illuminates a grating coupler waveguide system under a convenient angle of incidence. We deal here with the case when a limited incident beam impinges on the system, and we try to optimize the parameters of the beam in order to get the best coupling coefficient. Numerical results are given for both lossless and lossy photo-resists.
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