Determination of roughness and correlation length of dielectric surfaces in nano/micro scales using Kirchhoff Approximation method

Abstract

In this paper determination of surface roughness and correlation length for dielectrics were extensively investigated by applying Kirchhoff Approximation method for second order. The technique is based on two dimensional analysis of scattered light intensity from a dielectric rough surface. The result show that the scattered intensities from a dielectric rough surface for the second order approximation are almost the same as for the first order. The results also show that by using Kirchhoff Approximation method, both surface roughness and correlation length simultaneously can be determined, if the scattered light intensity for two different incident angles is known. The investigations also show that the accuracy for evaluating the ratio of scattered light intensity to incident light intensity can influence the results.