Beckmann formulation for accurate determination of submicron surface roughness and correlation length

Abstract

In this paper determination of surface roughness and correlation length were broadly investigated by applying Beckmann formulations. The technique is based on analysis of scattered light intensity from a rough surface. The results show that by using Beckmann formulations, both surface roughness and correlation length simultaneously can be determined precisely, if the scattered light intensity for two different incident angles is known accurately. The technique was used for surface with roughness within the range of 100–1000nm. The results show that the roughness and correlation length can be determined accurately if appropriate angles are considered for the incident and scattered wave light. The investigations also show that the accuracy for evaluating the ratio of scattered light intensity to incident light intensity can influence the results significantly.