Determination of impurities in germanium tetrafluoride by IR spectroscopy and gas chromatography

Abstract

Using high-resolution Fourier-transform IR spectroscopy and gas chromatography, we have identified more than 20 impurity species, in concentrations from 10−1 to 10−5 vol %, in GeF4 samples of different isotopic compositions. The germanium tetrafluoride samples are shown to contain C1–C4 hydrocarbons; hydrogen, carbon, silicon, and sulfur fluorides; fluorogermanes; fluorosilanes; and carbon and nitrogen oxides.