Abstract
In this study, a procedure for analyzing the hydrogen content of used getter material is described based on mass spectrometry coupled to thermal gravimetry. It is shown that hydrogen masses per getter mass in the range of 2 – 15 mg/g can be quantified. At least three differently strong hydrogen binding situations are found with the thermal desorption program applied so far. Up to 450 °C only traces of hydrogen can be desorbed from the getter material with the applied method and up to 99% is released on heating up to 800 °C.
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