Abstract
An efficient inverse procedure to solve the inverse scattering problem has been developed and the Debye–Waller factors have been determined from the elastic diffraction peaks of only one experimental setup (one data set) of thermal energy atomic scattering from solid scattering from solid surfaces. The new inverse procedure preserves the correlation between elastic scattering and thermal attenuation. The computations of the sophisticated He scattering from LiF(001) surface support the correctness of the new procedure. The computations have been compared with the results of the analysis of several different experimental setups.
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