Determination and experimental verification of high-temperature SAW orientations on langatate

Abstract

Langatate (LGT) is a member of the langasite family of crystals appropriate for high-temperature frequency control and sensing applications. This paper identifies multiple LGT SAW orientations for use at high temperature, specifically in the 400°C to 900°C range. Orientations with low sensitivity to temperature are desired for frequency control devices and many sensors, conversely large temperature sensitivity is a benefit for temperature sensors. The LGT SAW temperature behavior has been calculated for orientations sweeping the Euler angles (0°, Θ, ψ), (90°, Θ, ψ), and (ψ, 90°, ψ), based on newly identified high-temperature elastic constants and temperature coefficients for this material. The temperature coefficient of delay (TCD) and total frequency change over the temperature range were analyzed from 400°C to 900°C. Multiple SAW orientations were identified with zero-TCD between 400°C and 500°C. Although no orientations that have turn-over temperatures above 500°C were identified, several have low frequency variation with temperature, of the order of -0.8% over the range 400°C to 800°C. Temperature-sensitive orientations with TCD up to 75 ppm/°C at 900°C were identified, with potential for high-temperature sensor applications. The reported predictions are shown to agree with measured behavior of LGT SAW delay lines fabricated along 6 orientations in the (90°, 23°, ψ) plane. In addition, this work demonstrates that concurrently operated LGT SAW devices fabricated on the same wafer provide means of temperature sensing. In particular, the measured frequency difference between delay lines oriented along (90°, 23°, 0°) and (90°, 23°, 48°) has fractional temperature sensitivity that ranges from -172 ppm/°C at 25°C to -205 ppm/°C at 900°C.