Abstract
In this work, different from the typical gas sensors responding by gas adsorption on their surface, a new gas sensor using carbon nanotubes (CNTs) as electron emitters is introduced for detecting inert gases which hardly possess chemical or electrical adsorption in normal conditions. The proposed sensor works by figuring out the variation of the dark current and the initial breakdown voltage on Paschen's law under applied high voltage. As they depend on the gas composition and the pressure in a sealed chamber, it is possible to detect the identity and the concentration of unknown inert gas species.
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