Abstract
N2O sensors made with ZnO-based ZnCdO films were grown on Pyrex substrates by using the RF co-sputtering method. The structure of the N2O sensor was electrode/sensor/glass/illuminant. The mechanism of the photo-assisted oxidation and reduction process on the surface of the N2O sensors was investigated using light from a UV lamp and violet light emitting diode (LED). For photon exposure wavelengths of 365 and 405 nm, the sensitivity of the ZnO-based ZnCdO sensors was measured. From these measurements, the values of the sensitivity of the sensors with x = 0, 0.01, and 0.05 were found to be S = 1.44, 1.39, and 1.33 under LED light with a wavelength of 405 nm, respectively. These sensitivities were compared to those of SnO2 and WO3 materials measured at operating temperatures of 300–600 °C. Also, under exposure with UV light, the response times were observed to be 130 to 270 sec. These response times were slightly slower than that for the traditional method of thermal heating. However, they indicate that the described photon exposure method for N2O detection can replace the conventional heating mode. Consequently, we demonstrated that portable N2O sensors for room-temperature operation could be fabricated without thermal heating.
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