Abstract
Automatic laser focus adjustment and nondestructive flaw detection on a ceramic surface, as well as monitoring of the laser machining process have been successfully carried out using a system to detect, process and feed back the photoacoustic (PA) signal emitted from the laser irradiated work point during the laser-induced chemical solution etching of ceramics such as PbTiO3, PZT and Mn–Zn ferrite.
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