Abstract
A systematic study of the desorption behavior of Sb multilayers applied as a passivant to (001) GaAs is presented. Reflection high-energy electron diffraction, reflectivity, Auger electron spectroscopy, x-ray photoelectron spectroscopy, and thermal desorption data reveal unique and complementary information which can be used to monitor the progress of passivant desorption and substrate preparation for subsequent process steps. The data confirm that Sb acts as a robust barrier to surface contamination.
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