Abstract
Surface micro-structure analysis is very important for surface study in material science. Observations of surface atomic steps and reconstructed structures have been made using several techniques: reflection high energy electron microscopy (RHEEM), low energy electron reflection microscopy (LEERM) and low energy electron diffraction microscopy (LEEDM).In the present experiment, observations of surface micro-structures have been made using a scanning type reflection high energy electron diffraction (RHEED) microscopy. This technique has certain advantages of easy combinations with multiple surface analyzing techniques such as scanning electron microscopy (SEM), Auger electron spectroscopy (AES) and electron energy loss spectroscopy (ELS).A schematic diagram of the scanning RHEED microscope combined with the microprobe AES is shown in Fig. 1. RHEED patterns are observed on the fluorescent screen through a viewing port. To observe the micro-structure (scanning RHEED image or dark field image), a particular diffraction spot is selected by means of the other small fluorescent screen with an aperture.
Published Version
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