Abstract
This investigation examines a novel means of integrating high-performance AlN piezoelectric thin films with a flexible stainless steel substrate (SUS304) to fabricate a double-sided piezoelectric transducer for wind-power generators. The double-sided piezoelectric transducer is constructed by depositing AlN piezoelectric thin films on both the front and the back sides of SUS304 substrate. The titanium (Ti) and platinum (Pt) layers were deposited using a dual-gun DC sputtering system between the AlN piezoelectric thin film and the back side of the SUS304 substrate. Scanning electron microscopy and X-ray diffraction of AlN piezoelectric films reveal a rigid surface structure and highly c-axis-preferred orientation. To fabricate a transducer with a resonant frequency of about 90 Hz, a cantilever length of 1 cm and a vibration area of 1 cm2 are designed, based on the cantilever vibration theory. The maximum open circuit voltage of the power transducer is approximately 14.6 V.
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