Abstract
To upgrade the existing vacuum system, a new type of diode distributed ion pump (DIP) has been tested and developed for the National Synchrotron Light Source (NSLS) at Brookhaven National Laboratory. The new pumps consist of two titanium cathodes as before, but have five parallel 304 stainless-steel plates with 16-mm-diam holes to replace the 11-mm-diam cylinders of the old ‘‘egg crate’’ anode structure. They have pumping speeds for nitrogen of several tens of liters per seconds per meter at 10−9 Torr as is required by the NSLS for good lifetime operation. We first survey previous work on DIP and then present the results of our study on new pumps with different cell sizes and two different anode materials (aluminum and stainless steel). The pumping characteristics of the new pumps are much superior to the old types with respect to ultimate pressure and easier conditioning.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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