Design of ZnO/Ag/ZnO multilayer transparent conductive films

Abstract

We have studied the properties of ZnO/Ag/ZnO multilayers prepared on glass substrates by simultaneous RF magnetron sputtering of ZnO and dc magnetron sputtering of Ag. The electrical and optical performance of Ag and ZnO single layer films was also investigated. Different optimization procedures were used for good transparent conductive film. Several analytical tools such as spectrophotometer, scanning electron microscope (SEM), four-point probes were used to explore the causes of the changes in electrical and optical properties. Low sheet resistance of 3 Ω/sq. and transmittance over 90% at 580 nm was achieved. The results of optimization condition of both oxide layers and metallic Ag layers were illustrated.