Design of two-way self-moving linear ultrasonic motor

Abstract

This paper designsa two-way self-moving linear ultrasonic motor. The ultrasonic motor is composed of a diamond-shaped metal elastic body, a piezoelectric ceramic piece and a parallel guide rail. There is a slight gap between the driving foot and the parallel guide rail on both sides of the metal elastic body, and the grounded aluminum tube is sandwiched between the diamond-shaped metal elastic body. By exciting the piezoelectric ceramic sheets on both sides of the elastic body, the first-order bending vibration mode is excited to realize the bidirectional movement of the motor. Based on the analysis of the working principle of the ultrasonic motor, the finite element harmonic response analysis of the ultrasonic motor was carried out. A prototype is made for mechanical properties experiments. Experiments show that under the excitation of 200Vpp, the forward and reverse frequency of the ultrasonic motor is 18.18KHz and 18.07KHz, and the forward and reverse no-load speed is 43.76mm/s and 43.14mm/s. The no-load speed is close to.