Abstract
A series of ferroelectric superlattice films on ITO substrates have been artificially fabricated by radio frequency magnetron sputtering, starting from the PbZrO3 (PZO) and PbTiO3 (PTO) matrix targets. The design sequence of the layers has been changed via shifting sputtering target in the preparing processes. Diverse systems have been shaped and discussed by XRD, SEM and UV-Vis. UV-Vis absorption spectra have been paid more attention especially, due to the low-cost and non-destructive method to provide the information about the thicknesses of the films.
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