Abstract
A six-lens-entrance ion optics and its retractable vacuum housing for ion beam analytical instrument was designed. Based on an electrostatic energy analyser and mass spectrometer the instrument will allow us to carry out in situ monitoring of ion beam deposition (IBD) processes and relevant technologies via SIMS, low energy ion scattering (LEIS) and energy analysis of charge-exchange ions. To optimize the entrance optics, the computer code SIMION 4.0 was used.
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