Abstract
The quantitative surface composition analysis with low energy ion scattering (LEIS), which is the experimental technique with the information depth that can be restricted to the first atomic layer, is often obstructed by the experimental problems. A novel approach is presented in order to calculate the influence of the optics of the energy analyzer and the geometric primary ion beam profile to the position, the width and the intensity of peaks in LEIS spectra. The developed method is applied for the analysis of our LEIS experimental system. The obtained results are compared to simple analytical models. The results obtained for our experimental device show that the deviations are not significant, indicating that the experimental system is convenient for performing refined surface composition analysis.
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