Abstract
Aiming at the double motor driving structure of precision air suspension platform, the control strategy of the system is studied under the condition of various mechanical vibration and electrical signal noise. Based on controllability and observability of systems, the optimal controller is designed to realize the fast rise and fast stability of the system. Simulation results verify the effectiveness and feasibility of the control strategy, and the system performance is optimal.
Highlights
The guide mode of traditional rotary servo motor combined with ball screw driven in precision motion platform has been gradually replaced by non friction supporting technology and non friction direct drive technology
Precision air suspension platform has the advantages of high precision, no friction, low pollution and other advantages, which are widely used in the field of lithography technology, ultra precision machining, detection of biological technology, nano surface topography measurement, and to continue to develop in the direction of high speed, high acceleration, high accuracy [3], [4]
A dual motor drive structure for precision air suspension platform is established, and the mathematical model of the system is established under the condition of various mechanical vibration and electrical noise
Summary
The guide mode of traditional rotary servo motor combined with ball screw driven in precision motion platform has been gradually replaced by non friction supporting technology and non friction direct drive technology. The flotation technology oriented and bearing support form precision air motion platform is gradually in the field of high speed high accuracy servo motion emerge [1], [2], which directly driven by linear motor for the way to eliminate the system friction and dead zone nonlinear disturbance and structure with no mechanical contact, can achieve sub micron or even nanometer positioning accuracy in the long travel range. [7] and [8] respectively in the application of fuzzy algorithm and neural network algorithm to suppress the residual vibration and vibration control system by input shaping technique. These control algorithms have certain compensation to the system, but the system performance affected. This paper for precision air suspension platform of double motor drive structure, in the presence of external disturbances, the system of modeling and optimal control strategy are designed, so as to achieve the system's rapid rise and rapid and stable, the performance of the system to achieve optimal
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