Abstract
Nowadays most setups of Tip-enhanced Raman Spectroscopy use the commercial Scanning Probe Microscope that is not designed for TERS, which results in narrow operation space, small scanning scope, etc. In this paper, a scanning stage system for TERS is designed. The system is driven by piezoelectric ceramic and uses capacitive sensor as the feedback of displacement to compensate the hysteresis and creep effect of piezoelectric ceramics. This paper introduces the mechanical structure of the system and the principle of the signal processing circuit of the capacitive sensor. The mechanical structure is simulated and the capacitive sensor is calibrated. The experimental results indicated that the system can realize the scanning scope of 20μm, and the capacitance sensor has high precision and good repeatability.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: DEStech Transactions on Engineering and Technology Research
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
